66 -- Upgrade of an Existing Low-Pressure Chemical Vapor Deposition (LPCVD) Furnace System

The Naval Research Laboratory (NRL) intends to negotiate a contract, on an other than full and open competition basis, with MRL Industries, 19500 Nugget Road, Sonora, CA 95370 for the in-house upgrade of an existing NRL owned low-pressure chemical vapor deposition (LPCVD) furnace system to provide silicon oxide thin films. The upgrade is to be made to the MRL Industries Model 6500 795 856 R00 dual-stack furnace system presently configured with a lower tube for silicon nitride/polysilicon LPCVD and an upper tube configured for atmospheric pressure wet-oxidation of silicon. The upgrade of the present dual stack configuration will convert the high-temperature wet-oxidation furnace to a low-temperature oxide (LTO) furnace and utilize components of the wet-oxidation furnace to construct a stand-alone bench-top high-temperature wet-oxidation furnace. Other business opportunities for NRL are available at our website http://heron.nrl.navy.mil/contracts/rfplist.htm See Numbered Note 22.