Description
This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. SYNOPSIS SOLICITATION FOR COMMERCIAL ITEMS 1. Class Code: 66 2. NAICS Code: 333295 3. Subject: Mask Alignment System 4. Solicitation Number: W911QX-12-T-0006 5. Set-Aside Code: 100 percent Small Business 6. Response Date: 11/21/2011 7. Place of Performance: US Army Contracting Command - Aberdeen Proving Ground Adelphi Contracting Division 2800 Powder Mill Road Adelphi, MD 20783-1197 8. (i) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) The solicitation number is W911QX-12-T-0006. This acquisition is issued as an request for quotation (RFQ). (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-53. (iv) This acquisition is set-aside for 100 percent Small Businesses. The associated NAICS code is 333295. The small business size standard is 500 employees. (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable): CLIN 0001 - Quantity: One (1), Unit of Issue: EA, Description: Mask Alignment System, shipping, and training according to salient characteristics. (vi) Description of requirements: Salient Characteristics (below) Mask Alignment system C.1 Mask Alignment System Requirement -The Contractor shall deliver quantity one (1) Mask Alignment System that meets all requirements as stated below: C.1.1 The Contractor shall ensure the Mask Alignment System processes substrates that meet the specifications listed in Table one Table one: Wafer Diameter (millimeter/mm): 100mm Thickness Range (micrometer/um): 200um-1000um Configuration: Semiconductor Equipment and Materials International (SEMI) standard flats Materials: Silicon, Glass, Gallium Arsenide, Sapphire, Silicon Carbide Wafer Diameter (mm): 150mm Thickness Range (um): 300um-1000um Configuration: SEMI standard flats or notch Materials: Silicon, Glass, Gallium Arsenide, Sapphire, Silicon Carbide Wafer Diameter (mm): 200mm Thickness Range (um): 400um-1000um Configuration: SEMI standard flats or notch Materials: Silicon, Glass, Gallium Arsenide, Sapphire, Silicon Carbide C.1.2 The Contractor shall ensure the Mask Alignment System meets or exceeds the accuracy and resolution specifications in Table two. Table two: System accuracy and resolution: Type: Alignment Accuracy Location: Top side Alignment Spec: Plus or minus 0.5 microns (um) Type: Alignment Accuracy Location: Bottom side Alignment Spec: Plus or minus 1.0 microns (um) Type: Alignment Accuracy Location: Large Gap Alignment Spec: Plus or minus 1.25 microns (um) Type: Exposure Location: Resolution in vacuum contact Spec: Less than 1.0 um Type: Exposure Location: Resolution in proximity contact Spec: Greater than or equal to 2.0 um C.1.3 The Contractor shall ensure that the Mask Alignment System consists of a fully functional front side and backside alignment systems with the following capabilities: - Wafer sizes up to 200mm - Semi-automatic loading with mechanical pre-alignment on chuck - Manual alignment stage with precision micrometers compatible with the alignment specifications in table two - High resolution optics in the Near Ultra Violet (NUV) range (wavelength 280-450 nanometers) with lamp house for 1000 Watt Mercury lamps - A topside microscope and a bottomside microscope with high (greater than one megapixel) resolution charge coupled device (CCD) cameras and viewing screen - Mask holders of sizes 5 inch by 5 inch, 7 inch by 7 inch, and 9 inch by 9 inch - Integrated vibration isolation table - Computer controlled operating environment to manage exposure profiles, wafer gap and alignment mode. C.1.4 The Contractor shall ensure the Mask Alignment System accommodates wafer thickness from 0.1 to 10 millimeters for topside configuration, quick (less than a minute) change of mask and chuck, and separation distance between mask and substrate of 0 to 300 microns adjustable via user input through integrated software and computer controlled operating environment. C.1.5 The Contractor shall ensure the Mask Alignment System fully operates in the following exposure modes: hard, soft, vacuum contact, and proximity. C.1.6 The Contractor shall ensure the Mask Alignment System is configured for bond alignment through the possible future addition (through a separate procurement) of commercial bond alignment fixtures capable of anodic bonding (0-2kV, 0-50mA), thermo-compression bonding (0-60kN, 25-500 degrees Celsius, 1e-3-1e3mbar) and fusion pre-bonding for substrates of the sizes and materials listed in table one. C.1.7 The Contractor shall ensure the Mask Alignment System is new (unused and not refurbished). C.1.8 The Contractor shall ensure the Mask Alignment System meets all industry standard requirements for safety as regulated by the Occupational Safety and Health Administration (OSHA) and National Electrical Safety Code including the use of Emergency Off (EMO) panic buttons, shielding and interlocks for hazardous areas including high voltages and moving parts. C.1.9 The Contractor shall provide the Technical Point of Contact two (2) complete sets of schematics (including electrical diagrams) of the Mask Alignment System and two (2) complete operating manuals written in English (of which quantity one (1) operating manual is printed on clean room paper, and one (1) is a digital copy in Portable Document Format (PDF)). C.1.10 The Contractor shall ensure the price offered includes destination shipping costs, insurance and any customs fees. C.1.11 The Contractor shall ensure the Mask Alignment System includes two (2) days (16 hours) of operation and maintenance training performed at the Army Research Lab (ARL) at 2800 Powder Mill Road, Adelphi, MD 20783. The Contractor shall ensure the training is performed either immediately following site installation, or the Contractor shall provide the TPOC with suggested training dates and times one week (1) prior to site installation if training does not immediately follow installation. The TPOC will approve or deny the proposed training dates and times within three (3) business days. C.1.12 The Contractor shall ensure that the Mask Alignment System is Nationally Recognized Testing Laboratory (NRTL) certified. C.1.13 The Contractor shall ensure that the Mask Alignment System: - Accommodates the loading of the substrate sizes listed in table one and piece parts derived from them as small as 10mm x 10mm squares - Has an alignment stage with precision micrometers supporting alignment in X, Y and Theta with micrometer spindles - Has a motorized Z-axis - Has an automatic wedge compensation system designed for optimized print gap control C.1.14 The Contractor shall ensure that vacuum contact wafer chucks for the Mask Alignment System are included for 100mm, 150mm, and 200 mm wafers and are configured as follows: - Seal for vacuum contact - Pre-alignment aid for manual loading - Hard coated and lapped surface finish for wafer contact area - Windows to enable bottom side alignment - Function with proximity, soft, hard and vacuum contact exposure - Function with vacuum contact with substrates up to 1.5 millimeters in thickness C.1.15 The Contractor shall ensure that mask holders are included for 5 inch by 5 inch, 7 inch by 7 inch and 9 inch by 9 inch masks with loading frame and have the following: - Round opening for exposure of wafers - Hard coated and lapped surface finish for mask contact area - Bottom loading system with automated vacuum transfer C.1.16 The Contractor shall ensure that the Mask Alignment System contains a lamp house for 1000 Watt Mercury lamps and includes: - Optical sets in NUV range (280-450 nanometers) - A light integrator - Optimized parallel light with exposure uniformities of plus or minus 3 percent for 150mm wafers and plus or minus 4 percent for 200mm wafers - An adjustment plate for Ultra Violet (UV) probes with diameter 44.5 millimeters and maximum height of 16 millimeters - A pre-installed filter changing unit for manual filter change C.1.17 The Contractor shall ensure that the Mask Alignment System includes a topside microscope with the following: - Motorized split field microscopes for alignment in visible light with high (in excess of one megapixel) resolution Charge Coupled Device cameras for top and bottom side - Travel range of one (1) top side microscope of 30 to 200 millimeters in X, and plus or minus 75 millimeters in Y. - Storage of objective positions - Digital Zoom software providing 2 times and 4 times image magnification for fine alignment - Two (2) 10 times objectives - Two (2) additional 10 times objectives configured for the alignment of single chips and wafer flat C.1.18 The Contractor shall ensure that the Mask Alignment System includes a bottom side microscope with the following: - Motorized split field microscopes for alignment in visible light with high (in excess of one megapixel) resolution Charge Coupled Device cameras - Bottom side alignment via cross hair - Travel range of one bottom side microscope of 78 to 180 millimeters in X, and plus or minus 12 millimeters in Y - Digital Zoom software providing 2 times and 4 times image magnification for fine alignment with objectives - Two (2) 10 times objectives C.1.19 The Contractor shall ensure that the Mask Alignment System has a computer controlled software environment that meets the following: - Microsoft-Windows based process software for recipes, processing and diagnostics - Automated recording of process parameters - Storage of files and presets on minimum 100GB hard disk - Password protected access levels for operator, engineer, and maintenance C.1.20 Pre-installation Acceptance Tests The Contractor shall demonstrate to the TPOC before shipment of the Mask Alignment System that the contact and bond aligner in the System is fully functional at the Contractor's facility using the following Government created acceptance tests. The Contractor shall propose to the TPOC a date and time for acceptance test attendance at least one (1) month prior to proposed date. The TPOC will accept or deny the proposed date and time within three (3) days. If denied, the Contractor shall propose a new date and time. C.1.20.1 Demonstration that the contact and bond aligner functionality of the Mask Alignment System meets base specifications listed in Table two in C.1.2 through: substrates handled programmability, exposure modes supported, exposure uniformity, repeatability, alignment modes, and alignment tolerances. C.1.20.2 Demonstration that the contact and bond functionality of the Mask Alignment System aligner is operationally functional through confirmation of alignment and exposure of 100mm, 150mm, and 200mm substrates in all alignment modes and exposure modes. C.1.20.3 Demonstration that the contact and bond aligner functionality of the Mask Alignment System is operationally functional as a bond aligner through aligning of 100mm, 150mm, and 200mm diameter substrates loaded into bonder compatible fixtures. C.2 Pre-installation Acceptance Tests Report The Contractor shall submit a pre-installation acceptance tests report to the TPOC outlining the results of the acceptance tests in C.1.20.1 within eight (8) months of contract award. The TPOC will approve the acceptance test report within one (1) week of receiving the results. The Contractor shall ship the contact and bond aligner only after the TPOC has approved the test results report. C.3 Delivery and Installation The Contractor shall deliver and install the Mask Alignment System at the ARL, 2800 Powder Mill Road, Bldg 207 Rm 3B-53 within four (4) weeks of receiving TPOC approval of the acceptance test report. The Contractor shall propose a delivery date to the TPOC at least three (3) weeks prior to proposed date. The TPOC will approve or deny the proposed date and time within three (3) days. If denied, the Contractor shall propose a new date and time. C.3.1 Post-installation Acceptance Tests The Contractor shall demonstrate to the TPOC that the Mask Alignment System is fully functional after the system has been installed in Bldg 207 Rm 3B-53 of the ARL and meets the specifications in Table One and Table Two using the following Government created acceptance tests: C.3.1.1 Demonstration that the contact and bond aligner meets base specifications through confirmation of substrates handled, programmability (specifications listed in C.1.9), exposure modes supported, exposure uniformity, repeatability, alignment modes, and alignment tolerances. C.3.1.2 Demonstration that the contact and bond aligner is operationally functional, which through confirmation of alignment and exposure of 100mm, 150mm, and 200mm substrates in all alignment modes and exposure modes. C.4 Post-installation Acceptance Tests Report The Contractor shall submit a post-installation acceptance test report to the TPOC outlining the results of the acceptance tests in C.3.1 within two (2) weeks of installation. The TPOC will approve the acceptance test report within one (1) week of receiving the results. C.5 Operator and Maintenance Training The Contractor shall conduct operator and maintenance training following the installation of the contact and bond aligner at ARL. For training purposes, the Contractor shall travel to ARL in Adelphi, Maryland, to provide two (2) days, a total of 16 hours, of operator and maintenance training for up to eight (8) participants. The Contractor shall ensure the training takes place within three (3) weeks of delivery date and time approved by TPOC in C.3. The Contractor may provide the training immediately following the post-installation acceptance tests. C.6 Troubleshooting and Warranty C.6.1 Troubleshooting The Contractor shall provide access to a technical support person to answer questions regarding tool operation, hardware troubleshooting, and basic imaging via telephone or email during normal business hours 0900-1700 for the time zone of the Contractor's main base of operation for the duration of ownership. The Contractor shall ensure the technical support person responds to voicemails and emails within two (2) business days. C.6.2 Warranty The Contractor shall provide a full warranty on the Mask Alignment System for one (1) year after approval of the post-installation test report. The Contractor shall ensure the warranty includes: - Installation and replacement of all parts (excluding consumable parts and materials) at no cost - All repairs or modifications if the Mask Alignment System is no longer functional according to the acceptance test specifications defined in C.1.20 at no cost - All labor and transportation costs to and from ARL for repairs and modification if the Mask Alignment System is no longer functional according to the acceptance test modifications defined in C.1.20 - A response time of 48 hours from the time the Government calls or emails in a request for service to diagnose and propose a plan to repair the system, and commence repair activities within 96 hours from the time of request C.7 Deliverables C.7.1 Pre-installation Acceptance Tests Report - The Contractor shall provide the TPOC with a Pre-installation Acceptance Tests Report prior to shipment of the Mask Alignment System within eight (8) months of contract award. The Contractor shall ensure the test report shows the test results for all required tests in C.1.20. The Contractor shall ensure the report is in electronic format. C.7.2 Post-installation Acceptance Tests Report - The Contractor shall provide the TPOC with a Post-installation Acceptance Tests Report after installation of the Mask Alignment System within two (2) weeks of installation. The Contractor shall ensure the test report shows the test results for all required tests in C.3.1. The Contractor shall ensure the report is in electronic format. C.7.3 Mask Alignment System - The Contractor shall deliver a Mask Alignment System that meets all specifications in C.1 to the location listed in C.3. (vii) Delivery is required by 09/17/12. Delivery shall be made to United States Army Research Laboratory, Shipping And Receiving, 2800 Powder Mill Rd Blg 102, Adelphi MD 20783-1197, (301) 394-5757. Acceptance shall be performed by an authorized Government Representative at the United States Army Research Laboratory. The FOB point is destination. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: NONE. (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: Technical, Past Performance and Price. The Technical element of the evaluation will be a determination as to whether the proposed product meets the performance characteristics and specifications in the solicitation. The Technical element of the evaluation shall be based solely on information furnished by the vendor. The Government is not responsible for locating or securing any information, which is not identified in the proposal. To ensure sufficient information is available, vendors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the Government to determine whether the product meets the performance characteristics and specifications of the requirement. If the offeror proposes to modify a product so as to conform to the requirement of this solicitation, the offeror shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Past performance will be evaluated based on information provided by the offeror as to actual sales of the proposed product to industry or Government agencies. Past performance will consider the ability of the offeror to meet technical specifications, delivery schedules (with warranty fulfillment and maintenance reputation included as applicable). Offerors shall include five (5) records of sales from the previous twelve (12) months. Offerors shall identify a point of contact for each sale by providing a name and telephone number. Price will be evaluated based on the total proposed price, including options, (if any). Technical and past performance are of equal importance and when combined are significantly more important than price. The Government reserves the right to award to other than the lowest price and to award without discussions. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARS 252.212-7000, Offeror Representations and Certifications -Commercial Items, with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: NONE. (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: 52.209-6, 52.219-6, 52.219-8, 52.219-28, 52.222-3, 52.222-19, 52.222-21, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.222-40, 52.223-18, 52.225-13, 52.232-29, 52.232-33, 52.203-3, 252.203-7000, 252.225-7001, 252.225-7009, 252.225-7012, 252.232-7003, 252.243-7002, 252.247-7023, 252.247-7024. (xiii) The following additional contract requirement(s) or terms and conditions apply: 52.204-7, 52.204-10, 52.222-50, 52.225-25, 52.223-18, 52.233-3, 52.233-4, 252.211-7003, 252.211-7003 Alt I, 52.004-4409, 52.004-4411, 52.016-4407, 52.046-4400, 52.032-4418, 5152.232-4003, 52.005-4401, 52.011-4401, AMC-LEVEL PROTEST PROGRAM (JUL 2011), US ARMY RESEARCH, DEVELOPMENT AND ENGINEERING COMMAND CONTRACTING CENTER (RDECOMAC) - ADELPHI CONTRACTING DIVISION WEBSITE. A copy of the full text of these provisions will be made available upon request. (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as: NONE. (xv) The following notes apply to this announcement: This action is 100 percent set-aside for small business concerns. (xvi) Offers are due on 11/21/2011, by 12:00AM, at 2800 Powder Mill Road, Bldg 601, Adelphi, MD 20783 or via email to andrew.j.ordway.civ [at] mail.mil. (xvii) For information regarding this solicitation, or full text of any of the clauses referenced, please contact Andrew Ordway, 301-394-2029, andrew.j.ordway.civ [at] mail.mil.