59 -- Atomic Layer Deposition Reactor

The Naval Research Laboratory intends to award to Cambridge Nanotech Inc., on other than full and open competitive basis, a contract to purchase 1 each 8 inch Atomic Layer Deposition Reactor Model: Savannah-200 for 8 inch diameter silicon wafers including two precursor lines. (Microsoft IE required). Additional specifications will appear in the RFQ. Sole source based on unique capabilities of Cambridge Nanotech Inc. See note(s) 22. Vendors who feel that they can provide the above equipment shall fully identify their interest and submit their capabilities to meet the above requirements within 15 days after the publication of this synopsis. Responses received after 15 days or without the required information will be considered non-responsive to the synopsis and not be considered. Note: All offerors will be ineligible for award unless they have registered in DOD’s Central Contractor Registration database. Information on CCR registration and annual confirmation requirements can be obtained via Internet at http://www.ccr.gov or by calling 1-888-227-2423.