66--Atomic Layer Deposition System

(i) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) The solicitation number is W911QX-12-R-0046. This acquisition is issued as an request for quotation (RFQ). (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-60. (iv) This acquisition is set-aside for small business concerns. The associated NAICS code is 333295, SIC Code is 3559. The small business size standard is 500 employees. (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable): CLIN 0001 - Quantity: One (1), Unit of Issue: EA, Description: Atomic Layer Deposition System, shipping, and training according to salient characteristics. OPTION CLIN 0002 - Quantity; One (1), Unit of Issue: EA, Description: Remote Plasma Source OPTION CLIN 0003- Quantity; Five (5), Unit of Issue: EA, Description: precursor manifold and valve packages OPTION CLIN 0004 - Quantity; One (1), Unit of Issue: EA, Description: Reactant Gas inputs OPTION CLIN 0005 - Quantity; One (1), Unit of Issue: EA, Description: Reactant Gas MFC including positive shut-off valve compatible with the deposition of ALD materials listed as part of section C.3.2 OPTION CLIN 0006- Quantity; One (1), Unit of Issue: EA, Description: Reactant Gas MFC including positive shut-off valve compatible with the deposition of ALD materials listed as part of section C.3.2 OPTION CLIN 0007 - Quantity; One (1), Unit of Issue: EA, Description: liquid/solid reactant input (high vapor pressure) precursor OPTION CLIN 0008 - Quantity; One (1), Unit of Issue: EA, Description: liquid/solid reactant input (low vapor pressure bubbler type) precursor OPTION CLIN 0009 - Quantity; One (1), Unit of Issue: EA, Description: Residual Gas Analyzer OPTION CLIN 0010 - Quantity; One (1), Unit of Issue: EA, Description: Spare Parts (vi) Description of requirements: C.1 Atomic Layer Deposition System Requirement (CLIN 0001) The Contractor shall deliver and install at the Army Research Laboratory (ARL), Adelphi, MD a quantity of one (1) fully functional Atomic Layer Deposition (ALD) System that meets all requirements as stated in the attached revised salients. (vii) Delivery is required by 4/30/2013. Delivery shall be made to United Sates Army Research Laboratory, Shipping And Receiving, 2800 Powder Mill Rd Blg 102, Adelphi MD 20783-1197, (301) 394-5757. Acceptance shall be performed at the Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783. The FOB point is destination. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: NONE. (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforms to the solicitation and will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: Technical, Past Performance and Price. The Technical element of the evaluation will be a determination as to whether the proposed product meets the performance characteristics and specifications in the solicitation. The Technical element of the evaluation shall be based solely on information furnished by the vendor. The Government is not responsible for locating or securing any information, which is not identified in the proposal. To ensure sufficient information is available, vendors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the Government to determine whether the product meets the performance characteristics and specifications of the requirement. If the offeror proposes to modify a product so as to conform to the requirement of this solicitation, the offeror shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Past performance will be evaluated based on information provided by the offeror as to actual sales of the proposed product to industry or Government agencies. Past performance will consider the ability of the offeror to meet technical specifications, delivery schedules (with warranty fulfillment and maintenance reputation included as applicable). Offerors shall include four (4) records of relevant sales for similar systems from the previous 12 months. Offerors shall identify a point of contact for each sale by providing a name and telephone number. Price will be evaluated based on the total proposed price, including options, (if any). Technical and past performance are of equal importance and when combined are significantly more important than price. The Government reserves the right to award to other than the lowest price and to award without discussions. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARS 252.212-7000, Offeror Representations and Certifications -Commercial Items, with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: NONE. (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: 52.203-3,52.203-6, 52.203-6 ALT I, 25.204-10, 52.209-6, 52.209-10, 52.219-6, 52.219-8, 52.219-14, 52.219-28, 52.222-3, 52.222-19, 52.222-21, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.222-40, 52.223-18, 52.225-13, 52.232-33, 52.245-1, 252.203-7000, 252.211-7003, 252.211-7003 ALT I, 252.211-7007, 252.225-7001, 252.225-7012, 252. 252.232-7003, 252.243-7002, 252.247-7023. The full text of a clause may be accessed electronically at this/these address(es): http://farsite.hill.af.mil/ and https://www.acquisition.gov/Far/. (xiii) The following additional contract requirement(s) or terms and conditions apply: ACC-APG-ADL-B.5152.204-4409, ACC-APG-ADL-B.5152.204-4411, ACC-APG-ADL-B.5152.216-4407, ACC-APG-ADL-E.5152.246-4400, ACC-APG-ADL-G.5152.232-4418, ACC-APG-ADL-H.5152.205-4401, ACC-APG-ADL-H.5152.211-4401, ACC-APG-ADL-L.5152.203-40, ACC-APG-ADL-L.5152.215-41. A copy of the full text of these provisions will be made available upon request. (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as: NONE. (xv) The following notes apply to this announcement: This action is 100 percent set-aside for small business concerns. (xvi) Offers are due on 09/25/2012, by 11:59 AM, at 2800 Powder Mill Road, Bldg 601, Adelphi, MD 20783 or via email to [email protected]. (xvii) For information regarding this solicitation, please contact Tracie Hardy, 301-394-1203, [email protected].