DEPOSITION OF SILICON DIOXIDE LAYERS ON 100 MM DIAMETER SEMICONDUCTOR WAFERS BY LOW PRESSURE CHEMICAL VAPOR DEPOSITION AT 720 °C USING TETRAETHYL ORTHOSILICATE PRECURSOR

Synopsis: NASA/NSSC has a requirement for DEPOSITION OF SILICON DIOXIDE LAYERS ON 100 MM DIAMETER SEMICONDUCTOR WAFERS BY LOW PRESSURE CHEMICAL VAPOR DEPOSITION AT 720 °C USING TETRAETHYL ORTHOSILICATE PRECURSOR. NASA/NSSC will be the procuring center for this effort. Performance will be located at NASA/ Glenn Research Center (GRC). This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; offers are being requested and a written solicitation will not be issued. This solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2020-05. The Government intends to acquire commercial items and services using the provisions, clauses and procedures prescribed in FAR Part 12 and FAR Part 13. This is a Request for Quotations (RFQ), 80NSSC21759054Q. Additional details are included in the attached RFQ file. The attached RFQ file is hereby incorporated into this solicitation. Delivery is FOB Destination. This Procurement is Set Aside for Small Business The NAICS Code for this procurement is 334413 All responsible sources may submit a quote which shall be considered by the agency. However, any award from this RFQ shall require the potential vendor to be certified within the System for Award Management System (SAM) and completion of Reps and Certs in the SAM system prior to award at www.sam.gov. Quotes for the item(s) described in the RFQ are due by 3/4/2021 by 4:00 p.m. CT to Jonathan Gomez at [email protected] in order to be considered for award. If it is in the best interest of the Government, quotes submitted after the due date may be accepted. If the end product offered is other than a domestic end product as defined in the clause entitled "Buy American Act -- Supplies," the offeror shall so state and shall list the country of origin. All contractual and technical questions must be in writing (e-mail) to Jonathan Gomez at [email protected] no later than 3/2/2021 by 2:00 p.m. CT. Telephone questions shall not be accepted. The following clauses and provisions are applicable to this combined synopsis/solicitation: 52.212-1, Instructions to Offerors; 52.212-3 Offeror Representations and Certifications—Commercial Items; 52.212-4 Contract Terms and Conditions—Commercial Items; 52-212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders—Commercial Items. NASA Clause 1852.215-84, Ombudsman, is applicable. The Center Ombudsman for this acquisition can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html . The FAR may be obtained via the Internet at URL: http://www.acquisition.gov/far/index.html The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.html Offerors must include completed copies of the provision at 52.212.3 Offeror Representations and Certifications-Commercial Items with their offer. These representations and certifications will be incorporated by reference in any resultant contract. Contracting Office Address: NASA Shared Services Center, Jerry Hlass Rd. Stennis Space Center, MS 39529