Oxide Molecular Beam Epitaxy (MBE) System

SLAC seeks vendors that can provide one (1) each of Oxide Molecular Beam Epitaxy (MBE) System for the development of a program aimed at thin film growth and in situ angle resolved photoemission spectroscopy (ARPES). Technical Specification are as follows: 1. Growth Chamber a. Minimum of 8 CF flanged effusion cell ports. b. Port for e-beam source c. Liquid Nitrogen cryopanel to minimize outgassing d. Port for 6in or 8in RHEED screen with manual shutter e. Port for RHEED gun f. Port for quartz crystal monitor g. Ports for atomic adsorption spectroscopy h. Ports for ellipsometry i. Port for pyrometer. (Pyrometer not to be included in purchase.) j. Port for Residual Gas Analyzer (RGA to be included in this purchase) k. Port for mounting ozone injector l. Port(s) for Ion Gauge (Ion gauges and controllers to be included in this purchase) m. Port for sample transfer n. Port for sample substrate manipulator o. Viewports in convenient locations p. Pumping port(s) appropriately sized for chamber q. Growth chamber must be designed to be compatible with ozone assisted MBE growth r. Growth chamber must be designed to eliminate cross-contamination between effusion cells s. Growth chamber must be angled to prevent any residue on substrate manipulator from falling into the effusion cell sources t. Growth chamber must include all necessary manifolds for water cooling of effusion cells and pneumatic control of effusion cell shutters u. Growth chamber must include all pumping to be compatible with ozone and able to achieve better than 9x10^-10 Torr vacuum v. Growth chamber to include all hardware and electronics for vacuum monitoring w. Growth chamber to include vacuum safety interlock system 2. Substrate Manipulator a. Substrate manipulator must be designed to be compatible with ozone assisted growth b. Manipulator must include heater capable of temperatures > 1000C in > 1x10^-5 Torr oxygen or ozone c. Manipulator must be capable of handling flag style sample holders from vendors as Omicron and/or VG Scienta d. Substrate manipulator must be rotatable for alignment of RHEED patterns e. Substrate manipulator must be capable of continuous azimuthal rotation for film uniformity during growth. f. Manipulator must include all power supplies, controller and cabling associated with heating and manipulation 3. Effusion Cells a. One high temperature effusion cell Cu b. One high temperature effusion cell for La c. One effusion cell for Ba d. One effusion cell for Sr e. Cells must be designed for use in >1 x 10^-5 torr oxygen and/or ozone f. Cells must have independent water cooling g. Cells must include linear blade shutter h. Cells must include all power supplies, controllers and cabling i. Cells must include crucible appropriate for material used. 4. Effusion cell monitoring a. System to include ability to monitor effusion cell flux either by beam flux monitor or quartz crystal monitor or both. b. System to include all electronics and cabling for monitoring effusion cell flux 5. Load LocK. a. System to include a complete load lock system b. Load lock must have quick access door and capable of low 10^-8 Torr vacuum c. Load lock must include all hardware to transfer substrate holders from load lock into growth chamber d. Load lock to include all pumps, gauges, electronics and cabling 6. Other Equipment a. System is to include electronics rack and all electronics and cabling necessary for MBE growth b. System is to include all bakeout equipment for baking system at 200C c. System is to include MBE control software * Computer and monitor for software included * Software capable of monitoring and/or controlling all relevant MBE parameters including effusion cell temperatures, shutters, vacuum pressures, manipulator position and heater control, effusion cell monitoring, etc. * Software should have module to generate and save growth recipes * Software should be user expandable as system is expanded THIS IS NOT A REQUEST FOR QUOTE. VENDORS INTERESTED IN BEING CONSIDERED AS A POTENTIAL SOURCE SHOULD IDENTIFY THEMSELVES AS AN "INTERESTED PARTY" VIA THE FBO PORTAL. DO NOT CONTACT THE SUBCONTRACT ADMINISTRATOR.